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Iborra Grau, Enrique enrique.iborra@upm.es

INGENIERÍA ELECTRÓNICA / Universidad Politécnica de Madrid

Publications

EFFECTS OF RESIDUAL GASES AND RF POWER ON ITO RF-SPUTTERED THIN-FILMS

  • CLEMENT, M
  • SANTAMARIA, J
  • IBORRA, E
  • GONZALEZDIAZ, G;

Vacuum (p. 447-449) - 1/1/1987

10.1016/0042-207x(87)90333-2 View at source

  • ISSN 0042207X

SPUTTERING PROCESS OF CU2S IN AN AR ATMOSPHERE

  • SANTAMARIA, J
  • IBORRA, E
  • MARTIL, I
  • GONZALEZDIAZ, G
  • SANCHEZQUESADA, F;

Vacuum (p. 433-436) - 1/1/1987

10.1016/0042-207x(87)90328-9 View at source

  • ISSN 0042207X

THIN CUXS SPUTTERED FILMS IN AR/H2 ATMOSPHERES

  • IBORRA, E
  • SANTAMARIA, J
  • MARTIL, I
  • GONZALEZDIAZ, G
  • SANCHEZQUESADA, F;

Vacuum (p. 437-439) - 1/1/1987

10.1016/0042-207x(87)90329-0 View at source

  • ISSN 0042207X

Assessment of the shear acoustic velocities in the different materials composing a high frequency solidly mounted resonator

  • DeMiguel-Ramos, M
  • Mirea, T
  • Olivares, J
  • Clement, M
  • Sangrador, J
  • Iborra, E

Ultrasonics (p. 195-199) - 1/9/2015

10.1016/j.ultras.2015.05.017 View at source

  • ISSN 0041624X

On the effectiveness of lateral excitation of shear modes in AlN layered resonators

  • Clement, M
  • Iborra, E
  • Olivares, J
  • DeMiguel-Ramos, M
  • Mirea, T
  • Sangrador, J

Ultrasonics (p. 1504-1508) - 1/1/2014

10.1016/j.ultras.2014.04.014 View at source

  • ISSN 0041624X

SAW characteristics of AlN films sputtered on silicon substrates

  • Clement, M
  • Vergara, L
  • Sangrador, J
  • Iborra, E
  • Sanz-Hervás, A

Ultrasonics (p. 403-407) - 1/1/2004

10.1016/j.ultras.2004.01.034 View at source

  • ISSN 0041624X

Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators

  • Munir, J
  • Mirea, T
  • DeMiguel-Ramos, M
  • Saeed, MA
  • Bin Shaari, A
  • Iborra, E

Ultrasonics (p. 153-160) - 1/2/2017

10.1016/j.ultras.2016.10.010 View at source

  • ISSN 0041624X

Optimized tilted c-axis AlN films for improved operation of shear mode resonators

  • DeMiguel-Ramos, M
  • Mirea, T
  • Clement, M
  • Olivares, J
  • Sangrador, J
  • Iborra, E

Thin Solid Films (p. 219-223) - 1/9/2015

10.1016/j.tsf.2015.08.010 View at source

  • ISSN 00406090

AlN films sputtered on iridium electrodes for bulk acoustic wave resonators

  • Clement, M
  • Olivares, J
  • Iborra, E
  • González-Castilla, S
  • Rimmer, N
  • Rastogi, A

Thin Solid Films (p. 4673-4678) - 30/6/2009

10.1016/j.tsf.2009.02.139 View at source

  • ISSN 00406090

Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films

  • Vergara, L
  • Olivares, J
  • Iborra, E
  • Clement, M
  • Sanz-Hervás, A
  • Sangrador, J

Thin Solid Films (p. 1814-1818) - 5/12/2006

10.1016/j.tsf.2006.07.002 View at source

  • ISSN 00406090

This researcher has no books.

This researcher has no book chapters.

BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions

  • SANGRADOR GARCIA, JESUS
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

Proceedings Of The Ieee Ultrasonics Symposium (p. 2189-+) - 1/12/2008

10.1109/ultsym.2008.0542 View at source

  • ISSN 10510117

Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors

  • Capilla Osorio, José
  • SANGRADOR GARCIA, JESUS
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

Proceedings Of The Ieee Ultrasonics Symposium (p. 1677-1680) - 1/12/2010

10.1109/ultsym.2010.5935777 View at source

  • ISSN 10510117

A SOLIDLY MOUNTED RESONATOR WITH CMOS-FABRICATED ACOUSTIC MIRROR FOR LOW-COST AIR QUALITY MONITORING

  • Farah H Villa López
  • Marina Cole
  • Enrique Iborra
  • Mario De-Miguel Ramos
  • Julian W Gardner

Proceedings Of The 2019 20th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii) (p. 1.242-1.245) - 23/6/2019

10.1109/transducers.2019.8808790 View at source

Frequency characterization of AlN piezoelectric resonators

  • SANGRADOR GARCIA, JESUS
  • IZPURA TORRES, JOSE IGNACIO
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • MALO GOMEZ, JAVIER
  • IBORRA GRAU, ENRIQUE

Proceedings Of The 2007 Ieee International Frequency Control Symposium-Jointly With The 21st European Frequency And Time Forum, Vols 1-4 (p. 374-377) - 1/12/2007

10.1109/freq.2007.4319100 View at source

Tunable mechanical resonator with aluminum nitride piezoelectric actuation

  • Olivares, J
  • Malo, J
  • González, S
  • Iborra, E
  • Izpura, I
  • Clement, M
  • Sanz-Hervás, A
  • Sánchez-Rojas, JL
  • Sanz, P
... View more Collapse

Proceedings Of Spie - The International Society For Optical Engineering - 9/8/2006

10.1117/12.664444 View at source

  • ISSN 0277786X

Ge and GeOx films as sacrificial layer for MEMS technology based on piezoelectric AIN: Etching and planarization processes

  • Sangrador, J
  • Olivares, J
  • Iborra, E
  • Vergara, L
  • Clement, M
  • Sanz-Hervás, A

Proceedings Of Spie - The International Society For Optical Engineering (p. 1-15) - 9/12/2005

10.1117/12.608244 View at source

  • ISSN 0277786X

Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications

  • L. Vergara
  • L. Pulido
  • SANGRADOR GARCIA, JESUS
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

Proceedings Of Spie - The International Society For Optical Engineering (p. 1-12) - 14/9/2009

10.1117/12.821485 View at source

  • ISSN 0277786X

Resonant Piezoelectric AlN-actuated Microcantilevers For Detection Of Antigen/Antibody Interactions

  • Oliver, M. J.
  • Hernando-Garcia, J.
  • Ababneh, A.
  • Seidel, H.
  • Schmid, U.
  • Olivares, J.
  • Iborra, E.
  • Pobedinskas, P.
  • Haenen, K.
  • Sanchez-Rojas, J. L.;
... View more Collapse

Proceedings Of Spie - The International Society For Optical Engineering - 25/7/2011

10.1117/12.887010 View at source

  • ISSN 0277786X

Simulation, fabrication and testing of aluminium nitride piezoelectric microbridges

  • Olivares, J
  • Clement, M
  • Iborra, E
  • Vergara, L
  • Sánchez-Rojas, JL
  • Vázquez, J
  • Sanz, P
... View more Collapse

Proceedings Of Spie - The International Society For Optical Engineering (p. 16-26) - 9/12/2005

10.1117/12.608228 View at source

  • ISSN 0277786X

Piezoelectric microresonators based on aluminim nitride for mass sensing applications

  • SANGRADOR GARCIA, JESUS
  • IZPURA TORRES, JOSE IGNACIO
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • MALO GOMEZ, JAVIER
  • IBORRA GRAU, ENRIQUE

Proceedings Of Ieee Sensors (p. 486-489) - 1/12/2008

10.1109/icsens.2008.4716483 View at source

This researcher has no working papers.

This researcher has no technical reports.

THIN FILM BULK ACOSUTIC RESONATOR DEVELOPMENT

  • Jimena Olivares Roza (Investigador principal (IP))
  • MIREA, TEONA (Coordinador/a científico/a)

Period: 01-05-2018 - 15-10-2020

Type of funding: Internal

  • iMarina

Sensores gravimétricos de gases basados en resonadores electroacústicos de película delgada de AlN para aplicaciones en temperaturas extremas

  • MIREA, TEONA (Miembro del equipo de trabajo)
  • CARMONA CEJAS, JOSE MANUEL (Miembro del equipo de trabajo)
  • OLIVARES ROZA, JIMENA (Investigador principal (IP))
  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
  • IZPURA TORRES, JOSE IGNACIO (Participante)
  • MALO GOMEZ, JAVIER (Participante)
  • Clement Lorenzo, Marta (Participante)
  • SANGRADOR GARCIA, JESUS (Participante)
... View more Collapse

Period: 01-01-2018 - 30-09-2021

Type of funding: National

Amount of funding: 198440,00 Euros.

  • iMarina

CHARACTERIZATION OF SPUTTERED THIN FILMS OF AISCN

  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
  • Clement Lorenzo, Marta (Investigador principal (IP))

Period: 26-06-2017 - 16-09-2019

Type of funding: Internal

  • iMarina

Materiales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

  • ESCOLANO MOYANO, JOSE MIGUEL (Miembro del equipo de trabajo)
  • SANGRADOR GARCIA, JESUS (Miembro del equipo de trabajo)
  • MIREA, TEONA (Miembro del equipo de trabajo)
  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
  • Clement Lorenzo, Marta (Investigador principal (IP))
  • OLIVARES ROZA, JIMENA (Participante)
  • IZPURA TORRES, JOSE IGNACIO (Participante)
  • MALO GOMEZ, JAVIER (Participante)
... View more Collapse

Period: 01-01-2014 - 31-10-2017

Type of funding: National

Amount of funding: 180018,37 Euros.

  • iMarina

Plataforma Multiplexada para el Diagnóstico de Enfermedades Cardiovasculares

  • Enrique Iborra Grau (Investigador principal (IP))
  • GEDAY, MORTEN ANDREAS (Miembro de equipo)

Period: 01-01-2014 - 31-12-2014

Type of funding: National

Amount of funding: 15000,00 Euros.

  • iMarina

Rapid Aptamer based diagnostics for bacterial meningitis

  • GEDAY, MORTEN ANDREAS (Investigador principal (IP))
  • IBORRA GRAU, ENRIQUE (Participante)
  • SANGRADOR GARCIA, JESUS (Participante)
  • Clement Lorenzo, Marta (Participante)
  • OTON SANCHEZ, JOSE MANUEL (Participante)
  • ESCOLANO MOYANO, JOSE MIGUEL (Participante)
  • QUINTANA ARREGUI, PATXI XABIER (Participante)
  • PEDRAZA DÍAZ, SUSANA (Participante)
  • IZPURA TORRES, JOSE IGNACIO (Participante)
  • OLIVARES ROZA, JIMENA (Participante)
... View more Collapse

Period: 01-07-2012 - 31-12-2015

Type of funding: International

Amount of funding: 1062578,28 Euros.

  • iMarina

Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)

  • Marta Clement Lorenzo (Investigador principal (IP))
  • MIREA, TEONA (Investigador/a)

Period: 01-01-2011 - 31-12-2014

Type of funding: National

Amount of funding: 242000,00 Euros.

  • iMarina

Yelmo

  • SANTAMARIA SANCHEZ-BARRIGA, JACOBO (Participante)
  • IZPURRA TORRES, JOSE IGNACIO (Participante)
  • CLEMENTE LOZANO, MARTA (Participante)
  • SANGADOR GARCIA, JESUS (Participante)
  • MALO GOMEZ, JAVIER (Participante)
  • OLIVARES ROZA, JIMENA (Participante)
  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
... View more Collapse

Period: 01-10-2007 - 30-09-2010

Type of funding: National

  • iMarina

TITULO REALIZACIÓN DE PROTOTIPOS DE GALGAS EXTENSIOMÉTRICAS INTEGRADAS EN BARRAS ESTABILIZADORAS DE AUTOMÓVIL MEDIANTE TECNOLOGÍA DE PELÍCULAS DELGADAS

  • IBORRA GRAU, ENRIQUE (Colaborador/a)
  • SANGRADOR GARCIA, JESUS (Investigador principal (IP))

Period: 12-03-2013 - 31-12-2017

Type of funding: Internal

  • iMarina

MOBILIS:Mixed SiP and SoC Integration of Power BAW Filters for Digital Wireless Transmissions

  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))

Period: 01-01-2006 - 30-06-2009

Type of funding: International

  • iMarina

Thin film electroacoustic resonators for physical and chemical sensing

  • IBORRA GRAU, ENRIQUE (Director)
  • OLIVARES ROZA, JIMENA (Director) Doctorando: Mirea, Teona

1/1/2017

  • iMarina

High sensitivity biosensors based on shear mode AIN resonators for in liquid operation

  • Clement Lorenzo, Marta (Director)
  • IBORRA GRAU, ENRIQUE (Director) Doctorando: MIGUEL RAMOS, Mario de

1/1/2016

  • iMarina

Tecnologías de fabricación de microsistemas electromecánicos actuados piezoeléctricamente con nitruro de aluminio

  • Enrique Iborra Grau (Director) Doctorando: Sheila González Castilla

1/1/2009

  • iMarina

Películas delgadas de nitruro de aluminio depositadas por pulverización y su aplicación a dispositivos de ondas acústicas

  • Enrique Iborra Grau (Director) Doctorando: Lucía Vergara Herrero

1/11/2005

  • iMarina

This researcher has no patents or software licenses.

Last data update: 3/5/24 7:41 PM