Influence of the Bias Substrate Power on the GDC Buffer Layer - Breaz, E; Breaz, E; Aubry, E; Aubry, E; Billard, A; Billard, A; Coton, N; Coton, N; Coquoz, P; Coquoz, P; Pappas, A; Pappas, A; et al. (Ecs Transactions, 2017)