Study of the formation mechanism of hierarchical silicon structures produced by sequential ion beam irradiation and anodic etching - Punzón-Quijorna E., Kajari-Shröder S., Agulló-Rueda F., Manso Silván M., Martín-Palma R., Herrero Fernández P., Torres-Costa V., Climent-Font A. (Vacuum, 2017)