Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing - Maria J. Bañuls; F. J. ORTEGA; F. Hortigüela; A. MAQUIEIRA; SANZA GUTIERREZ, FCO JAVIER; LAGUNA HERAS, MARIA FE; CASQUEL DEL CAMPO, RAFAEL; ANGULO BARRIOS, CARLOS; HOLGADO BOLAÑOS, MIGUEL (Applied Surface Science, 2011)