UV laser-induced high resolution cleaving of Si wafers for micro-nano devices and polymeric waveguide characterization - Casquel, R.; Holgado, M.; Garcia-Ballesteros, J. J.; Zinoviev, K.; Fernandez-Sanchez, C.; Sanza, F. J.; Molpeceres, C.; Laguna, M. F.; Llobera, A.; Ocana, J. L.; Dominguez, C.; (Applied Surface Science, 2011)