Air-coupled linear and sparse cMUT array manufactured using MUMPs process - Octavio, A.; O'Leary, R.L.; Whiteley, S.M.; Martínez-Graullera, Ó.; Martín-Arguedas, C.J.; Gómez-Ullate, L.; De Espinosa, F.M. (Microsystem Technologies, 2011)