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Author profile at the institutional portal

Hernandez Muńoz, Maria Jesus maria.jesus.hernandez@uam.es

Física aplicada / Universidad Autónoma de Madrid

Publications

KINETICS AND COMPOSITIONAL DEPENDENCE ON THE MICROWAVE-POWER AND SIH4/N2 FLOW RATIO OF SILICON-NITRIDE DEPOSITED BY ELECTRON-CYCLOTRON-RESONANCE PLASMAS

  • Hernandez, MJ
  • Garrido, J
  • Martinez, J
  • Piqueras Piqueras, Juan

Journal Of The Electrochemical Society (p. 3234-3237) - 1/1/1994

10.1149/1.2059309 View at source

  • ISSN 00134651

SILICON DIOXIDE DEPOSITION BY ELECTRON-CYCLOTRON-RESONANCE PLASMA - KINETIC AND ELLIPSOMETRIC STUDIES

  • Hernandez, MJ
  • Garrido, J
  • Piqueras, J

Journal Of Vacuum Science & Technology b (p. 581-584) - 1/1/1994

10.1116/1.587393 View at source

  • ISSN 10711023

ELECTRON-CYCLOTRON-RESONANCE PLASMA DEPOSITION AS A PROMISING TECHNIQUE FOR LOW-TEMPERATURE HARD COATINGS

  • Hernandez, MJ
  • Gomez, FJ
  • Garrido, J
  • Piqueras, J
  • Gomezaleixandre, C

Vacuum (p. 1023-1025) - 1/1/1994

10.1016/0042-207x(94)90012-4 View at source

  • ISSN 0042207X

Electrical properties of ECR plasma deposited SiO2: effect of the oxigen to silane flow ratio

  • Hernandez, MJ
  • Garrido, J
  • Martinez, J
  • Piqueras, J;

Semiconductor Science And Technology (p. 422-426) - 1/3/1996

10.1088/0268-1242/11/3/023 View at source

  • ISSN 13616641

Compositional and electrical properties of ECR-CVD silicon oxynitrides

  • Hernandez, MJ
  • Garrido, J
  • Martinez, J
  • Piqueras Piqueras, Juan

Semiconductor Science And Technology (p. 927-932) - 1/7/1997

10.1088/0268-1242/12/7/027 View at source

  • ISSN 13616641

Kinetic and electrical characterization of thin silicon oxide films obtained by electron cyclotron resonance plasma

  • Hernandez, MJ
  • Cervera, M
  • Garrido, J
  • Martinez, J
  • Piqueras Piqueras, Juan

Journal Of Materials Science-Materials In Electronics (p. 393-398) - 1/1/1999

10.1023/a:1008985125423 View at source

  • ISSN 09574522

Nitrogen incorporation in amorphous SiCN layers prepared from electron cyclotron resonance plasmas

  • Gomez Arribas, Fco Javier
  • Piqueras Piqueras, Juan
  • Hernandez Muñoz, Maria Jesus
  • Barbadillo, L
  • Gomez, FJ
  • Hernandez, MJ

Applied Physics A-Materials Science & Processing (p. 603-607) - 1/5/1999

10.1007/s003390050948 View at source

  • ISSN 14320630

Amorphous SixCyN layers prepared from electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD)

  • Barbadillo, L
  • Hernandez, MJ
  • Cervera, M
  • Piqueras, J

Boletin De La Sociedad Espanola De Ceramica Y Vidrio (p. 453-457) - 1/1/2000

10.3989/cyv.2000.v39.i4.797 View at source

  • ISSN 03663175

Low temperature electron cyclotron resonance plasma technique for low loss integrated optics

  • Pernas Martino, Pablo Luis
  • Ruiz, Eduardo
  • Hernandez Muñoz, Maria Jesus
  • Garrido Salas, Javier
  • Garcia Carretero, Basilio Javier
  • Castaño Palazon, Jose Luis
  • Requejo, JM
  • Solis, J.
  • Serna, R.
  • Alfonso, C.N.
  • Piqueras Piqueras, Juan
... View more Collapse

Microelectronic Engineering (p. 407-410) - 1/1/2000

10.1016/s0167-9317(00)00344-0 View at source

  • ISSN 01679317

Optical properties of Er and Yb co-doped lithium niobate waveguides

  • Cantelar Alcaide, Eugenio Francisco
  • Nevado Pérez, Rubén
  • Martin, Guillermo
  • Sanz-García, Juan Antonio
  • Lifante Pedrola, Gines
  • Cusso Perez, Fernando
  • Hernandez, MJ
  • Pernas Martino, Pablo Luis
... View more Collapse

Journal Of Luminescence (p. 1096-1098) - 1/1/2000

10.1016/s0022-2313(99)00553-0 View at source

  • ISSN 00222313

This researcher has no books.

Analysis of plasmonic structures by spectroscopic ellipsometry

  • Pau, J.L.
  • Garcia Marin, A.
  • Hernández Muñoz, M.J.
  • Cervera Goy, M.
  • Piqueras, J.

Analysis Of Plasmonic Structures By Spectroscopic Ellipsometry (p. 208-239) - 1/5/2016

10.4018/978-1-5225-0066-7.ch008 View at source

  • ISBN 9781522500674

Channel Waveguides in Er/Yb co-doped LiNbO3 by Zn diffusion for optical amplifiers in the 1.55 I'm region

  • Pernas, PL
  • Hernandez, MJ
  • Garrido, J
  • Piqueras, J
  • Moran, C
  • Ruiz, E
  • Nevado, R
  • Cantelar, E
  • Cusso, F
  • Lifante, G
... View more Collapse

Ecio''99: 9th European Conference On Integrated Optics And Technical Exhibition (p. 147-150) - 13/4/1999

  • iMarina

Low Temperature Electron Cyclotron Resonance Plasma Technique for Low Loss Integrated Optical Devices

  • Pernas Martino, Pablo Luis
  • Garcia Carretero, Basilio Javier
  • Hernandez Muñoz, Maria Jesus
  • Castaño Palazon, Jose Luis
  • Garrido Salas, Javier
  • Piqueras Piqueras, Juan

21/9/1999

  • iMarina

Surface silicon modification by N and C high dose implantation processes

  • Cervera Goy, Manuel

International Conference On Mass And Charge Transport In Inorganic Materials: Fundamentals To Devices (p. 469-476) - 28/5/2000

  • iMarina

Boron nitride synthesis by B+, C+ and N+ implantation in Silicon

  • Hernandez Muñoz, Maria Jesus
  • Cervera Goy, Manuel
  • Piqueras Piqueras, Juan

1/2/2001

  • iMarina

Mécanismes de croissance de SiC/Si(111) par CVD

  • Hernandez Muñoz, Maria Jesus

1/5/2001

  • iMarina

Low-energy carbon and nitrogen ion implantation in silicon

  • Piqueras Piqueras, Juan
  • Hernandez Muñoz, Maria Jesus
  • Cervera Goy, Manuel
  • Barbadillo, L
  • Hernandez, MJ
  • Cervera, M
  • Rodriguez, P
  • Munoz-Yague, A
... View more Collapse

Journal Of Vacuum Science & Technology b (p. 1124-1132) - 1/7/2001

10.1116/1.1381068 View at source

  • ISSN 10711023

Transmission electron microscopy study of ultra-thin SiC layers obtained by rapid thermal carbonization of Si wafers

  • Piqueras Piqueras, Juan
  • Hernandez Muñoz, Maria Jesus
  • Morales, FM
  • Molina, SI
  • Araujo, D
  • Cimalla, V
  • Pezoldt, J
  • Barbadillo, L
  • Hernandez, MJ
... View more Collapse

Physica Status Solidi A-Applications And Materials Science (p. 116-121) - 1/1/2003

10.1002/pssa.200306278 View at source

  • ISSN 00318965

ECR-PECVD SiCN deposition on silicon substrates

  • Hernandez Muñoz, Maria Jesus
  • Cervera Goy, Manuel
  • Piqueras Piqueras, Juan

1/2/2003

  • iMarina

Crystalline inclusions formed in C+N+BF2 coimplanted on silicon (111)

  • Ponce A
  • Morales F
  • Molina S
  • Barbadillo L
  • Cervera M
  • Hernández M
  • Rodríguez P
  • Piqueras J
... View more Collapse

Microchimica Acta (p. 165-169) - 1/1/2004

10.1007/s00604-003-0147-5 View at source

  • ISSN 00263672

Low temperature ECR-PECVD microcrystalline SiC growth by pulsed gas flows

  • Hernádez MJ
  • Cervera M
  • Piqueras J
  • Del Caño T
  • Jiménez J

Materials Science Forum (p. 309-312) - 1/1/2004

10.4028/www.scientific.net/msf.457-460.309 View at source

  • ISSN 02555476

This researcher has no working papers.

This researcher has no technical reports.

Realización de dispositivos FET con puerta dieléctrica de oxinitruro de silicio para aplicaciones en circuitos de memoria.

  • Hernández Muñoz, Mª Jesus (Investigador/a)
  • Martinez Rodriguez, Angel Javier (Investigador/a)
  • Garrido Salas, Javier (Investigador principal (IP))

Period: 01-07-1995 - 01-07-1998

  • iMarina

Transistores de GaN para microondas: aleaciones de SiC y SiCN depositadas por plasma ECR como substratos para crecimiento de GaN

  • Hernandez Muñoz, Maria Jesus (Investigador/a)

Period: 01-01-1998 - 31-12-2001

Type of funding: National

Amount of funding: 9790000,00 Euros.

  • iMarina

Development and application of new carbon nitride coatings in cutting tools (CARBON NITRIDE COATINGS)

  • Morant Zacares, Carmen (Investigador/a)
  • Hernandez Muñoz, Maria Jesus (Investigador/a)

Period: 01-10-1998 - 30-09-2001

Type of funding: European

  • iMarina

Síntesis y caracterización de SiCN y BCN para aplicaciones optoelectrónicas

  • Hernandez Muñoz, Maria Jesus (Investigador/a)

Period: 01-01-2002 - 31-12-2005

  • iMarina

Nuevos enfoces para el crecimiento de nanohilos de SiGe modulados en composición orientados a nuevos nanodispositivos.

  • Piqueras Piqueras, Juan (Investigador/a)
  • Eduardo Ruiz Martin (Investigador/a)
  • Hernandez Muñoz, Maria Jesus (Investigador principal (IP))

Period: 10-01-2007 - 31-12-2010

  • iMarina

Nuevas tecnologías para el desarrollo de plataformas sensoras y biosensoras avanzadas.

  • Pingarrón, José Manuel (Investigador principal (IP))
  • Garcia Mendiola, Tania (Investigador/a)
  • Lorenzo Abad, Encarnacion (Investigador principal (IP))
  • del Pozo Vazquez, Maria (Investigador/a)
  • Parra Alfambra, Ana Maria (Investigador/a)
  • Petit Dominguez, Maria Dolores (Investigador/a)
  • Revenga Parra, Monica (Investigador/a)
  • Pariente Alonso, Felix (Investigador/a)
  • Casero Junquera, Maria Elena (Investigador/a)
  • Alonso Fuente, Concepcion (Investigador/a)
  • Laura Mora Martinez (Investigador/a)
  • Blanco Gil, Elias (Investigador/a)
  • Carmen Sagrario Hernandez Dominguez (Investigador/a)
  • Hernandez Muñoz, Maria Jesus (Investigador/a)
  • Quintana Mani, Maria del Carmen (Investigador/a)
  • Cervera Goy, Manuel (Investigador/a)
  • Pau Vizcaino, Jose Luis (Investigador/a)
  • Castaño Palazon, Jose Luis (Investigador/a)
  • Eduardo Ruiz Martin (Investigador/a)
  • Garcia Carretero, Basilio Javier (Investigador/a)
  • Braña de Cal, Alejandro Francisco (Investigador principal (IP))
  • Piqueras Piqueras, Juan (Investigador principal (IP))
  • Hernandez Hernandez, Pedro (Investigador principal (IP))
... View more Collapse

Period: 01-01-2010 - 31-12-2013

  • iMarina

Síntesis de nanohilos de ZnO y Ga(As, N) para detección de alta sensibilidad en los rangos UV e IR

  • Hernandez Muñoz, Maria Jesus (Investigador/a)
  • Cervera Goy, Manuel (Investigador/a)
  • Piqueras Piqueras, Juan (Investigador/a)
  • Eduardo Ruiz Martin (Investigador/a)
  • Garcia Carretero, Basilio Javier (Investigador/a)
  • Pau Vizcaino, Jose Luis (Investigador principal (IP))

Period: 01-01-2011 - 31-12-2013

  • iMarina

Células solares multibanda a partir de aleaciones con elevado desajuste de red

  • Garcia Carretero, Basilio Javier (Investigador principal (IP))
  • Braña de Cal, Alejandro Francisco (Investigador/a)
  • Hernandez Muñoz, Maria Jesus (Investigador/a)
  • Cervera Goy, Manuel (Investigador/a)

Period: 01-01-2014 - 31-12-2015

  • iMarina

Nuevas estrategias nanotecnológicas para el diseño y construcción de plataformas (bio)sensoras avanzadas integrables en instrumentación miniaturizada para aplicaciones clínicas y agroalimentarias

  • Pingarrón, José Manuel (Investigador principal (IP))
  • Garcia Mendiola, Tania (Colaborador/a)
  • Abad Lorenzo, Encarnación (Investigador principal (IP))
  • Hernandez Hernandez, Pedro (Investigador/a)
  • Blanco Gil, Elias (Investigador/a)
  • Quintana Mani, Maria del Carmen (Investigador principal (IP))
  • Pariente Alonso, Felix (Investigador/a)
  • Casero Junquera, Maria Elena (Investigador/a)
  • Petit Dominguez, Maria Dolores (Investigador/a)
  • Abad Pastor, Jose Maria (Investigador/a)
  • Piqueras Piqueras, Juan (Investigador principal (IP))
  • Pau Vizcaino, Jose Luis (Investigador/a)
  • Castaño Palazon, Jose Luis (Investigador/a)
  • Garcia Carretero, Basilio Javier (Investigador/a)
  • Lopez Martinez, Nair (Investigador/a)
  • Cervera Goy, Manuel (Investigador/a)
  • Braña de Cal, Alejandro Francisco (Investigador/a)
  • Hernandez Muñoz, Maria Jesus (Investigador principal (IP))
... View more Collapse

Period: 01-10-2014 - 30-09-2018

Amount of funding: 704720,00 Euros.

  • iMarina

Integración de Semiconductores III-V sobre SI para aplicaciones electrónicas y fotovoltaicas

  • Cervera Goy, Manuel (Investigador/a)
  • Garcia Carretero, Basilio Javier (Investigador principal (IP))
  • Lopez Martinez, Nair (Investigador/a)
  • Braña de Cal, Alejandro Francisco (Investigador/a)
  • Hernandez Muñoz, Maria Jesus (Investigador/a)

Period: 30-12-2016 - 29-12-2019

Type of funding: National

Amount of funding: 205700,00 Euros.

  • iMarina

Estudio de películas aislantes de silicio, oxígeno y nitrógeno depositadas por plasma ECR-CVD

  • María Jesús Hernández Muñoz (Director)
  • Garrido Salas, Javier (Autor o Coautor) Doctorando: María Jesús Hernández Muñoz

1/1/1998

  • iMarina

This researcher has no patents or software licenses.

Last data update: 3/18/24 11:49 PM