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Iborra Grau, Enrique enrique.iborra@upm.es

INGENIERÍA ELECTRÓNICA / Universidad Politécnica de Madrid

Publications

SPUTTERING PROCESS OF CU2S IN AN AR ATMOSPHERE

  • SANTAMARIA, J
  • IBORRA, E
  • MARTIL, I
  • GONZALEZDIAZ, G
  • SANCHEZQUESADA, F;

Vacuum (p. 433-436) - 1/1/1987

10.1016/0042-207x(87)90328-9 View at source

  • ISSN 0042207X

THIN CUXS SPUTTERED FILMS IN AR/H2 ATMOSPHERES

  • IBORRA, E
  • SANTAMARIA, J
  • MARTIL, I
  • GONZALEZDIAZ, G
  • SANCHEZQUESADA, F;

Vacuum (p. 437-439) - 1/1/1987

10.1016/0042-207x(87)90329-0 View at source

  • ISSN 0042207X

EFFECTS OF RESIDUAL GASES AND RF POWER ON ITO RF-SPUTTERED THIN-FILMS

  • CLEMENT, M
  • SANTAMARIA, J
  • IBORRA, E
  • GONZALEZDIAZ, G;

Vacuum (p. 447-449) - 1/1/1987

10.1016/0042-207x(87)90333-2 View at source

  • ISSN 0042207X

SAW characteristics of AlN films sputtered on silicon substrates

  • Clement, M
  • Vergara, L
  • Sangrador, J
  • Iborra, E
  • Sanz-Hervás, A

Ultrasonics (p. 403-407) - 1/1/2004

10.1016/j.ultras.2004.01.034 View at source

  • ISSN 0041624X

Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators

  • Munir, J
  • Mirea, T
  • DeMiguel-Ramos, M
  • Saeed, MA
  • Bin Shaari, A
  • Iborra, E

Ultrasonics (p. 153-160) - 1/2/2017

10.1016/j.ultras.2016.10.010 View at source

  • ISSN 0041624X

On the effectiveness of lateral excitation of shear modes in AlN layered resonators

  • Clement, M
  • Iborra, E
  • Olivares, J
  • DeMiguel-Ramos, M
  • Mirea, T
  • Sangrador, J

Ultrasonics (p. 1504-1508) - 1/1/2014

10.1016/j.ultras.2014.04.014 View at source

  • ISSN 0041624X

Assessment of the shear acoustic velocities in the different materials composing a high frequency solidly mounted resonator

  • DeMiguel-Ramos, M
  • Mirea, T
  • Olivares, J
  • Clement, M
  • Sangrador, J
  • Iborra, E

Ultrasonics (p. 195-199) - 1/9/2015

10.1016/j.ultras.2015.05.017 View at source

  • ISSN 0041624X

Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films

  • Vergara, L
  • Olivares, J
  • Iborra, E
  • Clement, M
  • Sanz-Hervás, A
  • Sangrador, J

Thin Solid Films (p. 1814-1818) - 5/12/2006

10.1016/j.tsf.2006.07.002 View at source

  • ISSN 00406090

Optimized tilted c-axis AlN films for improved operation of shear mode resonators

  • DeMiguel-Ramos, M
  • Mirea, T
  • Clement, M
  • Olivares, J
  • Sangrador, J
  • Iborra, E

Thin Solid Films (p. 219-223) - 1/9/2015

10.1016/j.tsf.2015.08.010 View at source

  • ISSN 00406090

Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems

  • Olivares, J
  • Clement, M
  • Gonzalez-Castilla, S
  • Vergara, L
  • Iborra, E
  • Sangrador, J

Thin Solid Films (p. 5128-5133) - 1/7/2010

10.1016/j.tsf.2010.03.013 View at source

  • ISSN 00406090

This researcher has no books.

This researcher has no book chapters.

AlN based-Solidly mounted resonators at high temperatures: In-situ characterization

  • MIREA, TEONA
  • SANGRADOR GARCIA, JESUS
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

18/9/2016

  • iMarina

Tungsten oxide as high acoustic impedance material for fully insulating acoustic reflectors

  • S. González
  • MIREA, TEONA
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

1/1/2015

  • iMarina

On the origin of RTS noise in nanoFETs

  • IZPURA TORRES, JOSE IGNACIO
  • Clement Lorenzo, Marta
  • IBORRA GRAU, ENRIQUE

10/9/2012

  • iMarina

Solidly mounted resonators with integrated carbon nanotube forests for chemical sensing

  • Teona Mirea
  • Jimena Olivares Roza
  • Marta Clement Lorenzo
  • Barbara Diaz Duran
  • Jesus Sangrador Garcia
  • Enrique Iborra Grau

4/9/2016

  • iMarina

Sputtered AlN thin films with tilted grains for shear mode resonators applied to biosensors

  • MIREA, TEONA
  • SANGRADOR GARCIA, JESUS
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

18/9/2016

  • iMarina

Liquid crystal tuneable millimetre wave reflectarray

  • Xabier Quintana, Morten A. Geday, José M. Otón, Enrique Iborra, Gerardo Pérez Palomino, Eduardo Carrasco, José A. Encinar

Xxii Conference On Liquid Crystals Clc’18 (p. 1-1) - 17/9/2018

  • iMarina

Sensors based on thin film bulk acoustic wave resonators: From fabrication to applications in chemical and biological analysis

  • Demiquel-Ramos M
  • Rughoobur G
  • Rajabalina N
  • Hamzehlou S
  • Escolano J
  • Iborra E
  • Flewitt A
... View more Collapse

Proceedings Of The International Display Workshops (p. 1312-1314) - 1/1/2017

  • ISSN 18832490
  • iMarina

Picosecond ultrasonics as a helpful technique for introducing a new electrode material in BAW technology: the iridium case

  • Nick Rimmer
  • Arnaud Devos
  • Amit Rastogi
  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

Proceedings Of The Ieee Ultrasonics Symposium (p. 1433-+) - 1/12/2007

10.1109/ultsym.2007.360 View at source

  • ISSN 10510117

Advanced determination of piezoelectric properties of AlN thin films on silicon substrates

  • Clement Lorenzo, Marta
  • OLIVARES ROZA, JIMENA
  • IBORRA GRAU, ENRIQUE

Proceedings Of The Ieee Ultrasonics Symposium (p. 903-+) - 1/12/2008

10.1109/ultsym.2008.0218 View at source

  • ISSN 10510117

Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors

  • Olivares J
  • Wegmann E
  • Clement M
  • Capilla J
  • Iborra E
  • Sangrador J

Proceedings Of The Ieee Ultrasonics Symposium (p. 1677-1680) - 1/12/2010

10.1109/ultsym.2010.5935777 View at source

  • ISSN 10510117

This researcher has no working papers.

This researcher has no technical reports.

Sensores gravimétricos de gases basados en resonadores electroacústicos de película delgada de AlN para aplicaciones en temperaturas extremas

  • MIREA, TEONA (Miembro del equipo de trabajo)
  • CARMONA CEJAS, JOSE MANUEL (Miembro del equipo de trabajo)
  • OLIVARES ROZA, JIMENA (Investigador principal (IP))
  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
  • IZPURA TORRES, JOSE IGNACIO (Participante)
  • MALO GOMEZ, JAVIER (Participante)
  • Clement Lorenzo, Marta (Participante)
  • SANGRADOR GARCIA, JESUS (Participante)
... View more Collapse

Period: 01-01-2018 - 30-09-2021

Type of funding: National

Amount of funding: 198440,00 Euros.

  • iMarina

Materiales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

  • ESCOLANO MOYANO, JOSE MIGUEL (Miembro del equipo de trabajo)
  • SANGRADOR GARCIA, JESUS (Miembro del equipo de trabajo)
  • MIREA, TEONA (Miembro del equipo de trabajo)
  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
  • Clement Lorenzo, Marta (Investigador principal (IP))
  • OLIVARES ROZA, JIMENA (Participante)
  • IZPURA TORRES, JOSE IGNACIO (Participante)
  • MALO GOMEZ, JAVIER (Participante)
... View more Collapse

Period: 01-01-2014 - 31-10-2017

Type of funding: National

Amount of funding: 180018,37 Euros.

  • iMarina

Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)

  • Marta Clement Lorenzo (Investigador principal (IP))
  • MIREA, TEONA (Investigador/a)

Period: 01-01-2011 - 31-12-2014

Type of funding: National

Amount of funding: 242000,00 Euros.

  • iMarina

Yelmo

  • SANTAMARIA SANCHEZ-BARRIGA, JACOBO (Participante)
  • IZPURRA TORRES, JOSE IGNACIO (Participante)
  • CLEMENTE LOZANO, MARTA (Participante)
  • SANGADOR GARCIA, JESUS (Participante)
  • MALO GOMEZ, JAVIER (Participante)
  • OLIVARES ROZA, JIMENA (Participante)
  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
... View more Collapse

Period: 01-10-2007 - 30-09-2010

Type of funding: National

  • iMarina

THIN FILM BULK ACOSUTIC RESONATOR DEVELOPMENT

  • Jimena Olivares Roza (Investigador principal (IP))
  • MIREA, TEONA (Coordinador/a científico/a)

Period: 01-05-2018 - 15-10-2020

Type of funding: Internal

  • iMarina

Plataforma Multiplexada para el Diagnóstico de Enfermedades Cardiovasculares

  • Enrique Iborra Grau (Investigador principal (IP))
  • GEDAY, MORTEN ANDREAS (Miembro de equipo)

Period: 01-01-2014 - 31-12-2014

Type of funding: National

Amount of funding: 15000,00 Euros.

  • iMarina

Rapid Aptamer based diagnostics for bacterial meningitis

  • GEDAY, MORTEN ANDREAS (Investigador principal (IP))
  • IBORRA GRAU, ENRIQUE (Participante)
  • SANGRADOR GARCIA, JESUS (Participante)
  • Clement Lorenzo, Marta (Participante)
  • OTON SANCHEZ, JOSE MANUEL (Participante)
  • ESCOLANO MOYANO, JOSE MIGUEL (Participante)
  • QUINTANA ARREGUI, PATXI XABIER (Participante)
  • PEDRAZA DÍAZ, SUSANA (Participante)
  • IZPURA TORRES, JOSE IGNACIO (Participante)
  • OLIVARES ROZA, JIMENA (Participante)
... View more Collapse

Period: 01-07-2012 - 31-12-2015

Type of funding: International

Amount of funding: 1062578,28 Euros.

  • iMarina

CHARACTERIZATION OF SPUTTERED THIN FILMS OF AISCN

  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))
  • Clement Lorenzo, Marta (Investigador principal (IP))

Period: 26-06-2017 - 16-09-2019

Type of funding: Internal

  • iMarina

TITULO REALIZACIÓN DE PROTOTIPOS DE GALGAS EXTENSIOMÉTRICAS INTEGRADAS EN BARRAS ESTABILIZADORAS DE AUTOMÓVIL MEDIANTE TECNOLOGÍA DE PELÍCULAS DELGADAS

  • IBORRA GRAU, ENRIQUE (Colaborador/a)
  • SANGRADOR GARCIA, JESUS (Investigador principal (IP))

Period: 12-03-2013 - 31-12-2017

Type of funding: Internal

  • iMarina

MOBILIS:Mixed SiP and SoC Integration of Power BAW Filters for Digital Wireless Transmissions

  • IBORRA GRAU, ENRIQUE (Investigador principal (IP))

Period: 01-01-2006 - 30-06-2009

Type of funding: International

  • iMarina

Thin film electroacoustic resonators for physical and chemical sensing

  • MIREA, TEONA (Titulado/a)
  • IBORRA GRAU, ENRIQUE (Director)
  • OLIVARES ROZA, JIMENA (Director) Doctorando: Mirea, Teona

1/1/2017

  • iMarina

High sensitivity biosensors based on shear mode AIN resonators for in liquid operation

  • Clement Lorenzo, Marta (Director)
  • IBORRA GRAU, ENRIQUE (Director) Doctorando: MIGUEL RAMOS, Mario de

1/1/2016

  • iMarina

Tecnologías de fabricación de microsistemas electromecánicos actuados piezoeléctricamente con nitruro de aluminio

  • Enrique Iborra Grau (Director) Doctorando: Sheila González Castilla

1/1/2009

  • iMarina

Películas delgadas de nitruro de aluminio depositadas por pulverización y su aplicación a dispositivos de ondas acústicas

  • Enrique Iborra Grau (Director) Doctorando: Lucía Vergara Herrero

1/11/2005

  • iMarina

This researcher has no patents or software licenses.

Last data update: 8/1/24 10:53 PM